In SIS, the probe only engages the sample surface when it collects sample information. In DFM, the probe is continually engaging the sample surface, even as it scans along the sample. Data-acquisition points are shown at the red arrows. After that, the probe is automatically withdrawn before it moves laterally from its current location to the next measurement point.įig.1-4 shows the probe motion during data acquisition by DFM and SIS. SIS (Sampling Intelligent Scan mode) is able to control the scanning speed based on the sample topography and only keep the probe engaged with the sample surface at each measurement point (i.e., each pixel) as it collects the morphology and material property information.
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